The use of Megasonic Cleaning technology has been shown to be an essential performance element in advanced cleaning applications. Combining over 40 years of industry know-how with some of the most reliable megasonic tank components available, IMTEC has designed a cleaning system for a wide-range of high-purity processes. The Accumeg is designed to provide continuous megasonic energy across the full width and depth of all the substrates in the process tank. This constant energy is the key to complete, fast, efficient megasonic cleaning and the elimination of particle reattachment.
Unlike other systems, which use "pulsed" megasonic transducer arrays in an attempt to achieve even, full coverage, the Accumeg megasonic transducer array covers the entire process load capacity of the tank without any of the energy loss associated with "shadowing" or "sequencing".
Backed by our extensive 36 month warranty, IMTEC's Accumeg series offers the reliability and productivity that ensures excellent uptime, minimum maintenance and the lowest cost of ownership.
Custom Megasonic Cleaning Equipment
Megasonic Tank & Transducer Standard Specifications
The following are general specifications that apply to IMTEC megasonic cleaning systems. Model specific information is supplied with each system:
Megasonic Frequencies: 975kHz & 730kHz (+/-25kHz) model dependent
Tank Materials: Quartz, PVDF, PFA, and Stainless Steel
Megasonic Transducer Plate: 316L Electropolished or PFA Teflon coated Stainless
Megasonic Transducer Cables: 25ohm Teflon jacketed, 5 meter length
Maximum operating temperature for Boundary layer system: 130°C*
Maximum operating temperature for direct systems: 70°C
Operating Voltage: 208-230VAC +/- 10% single phase
Limited Warranty: 36 months
Applicable Standards: Meets all applicable CE directives, 3rd party certified
*Requires adequate boundary layer cooling to keep transducer at 80°c or less.
Downloads & Related Information:
A world leader in wet processing components for the semiconductor industry, IMTEC manufactures a complete line of process proven megasonic cleaning and rinsing systems.
Effective wet process cleaning requires a precise integration of technology and components. With the Accumeg, IMTEC combines over 40+ years of wet processing experience with the most reliable megasonic components available. Accumeg systems not only deliver world-class cleaning performance, but offer the reliability and productivity that insure excellent up-time, minimum maintenance and the lowest cost of ownership.
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